FKM FOR SEMICONDUCTORS
DS1302 is a peroxide curable FKM designed for high performance semiconductor manufacturing applications where both high purity and low particle generation are required.
Technical Indexs
| Item | Unit | DS1302 | Test Method / Standard |
| Appearance | / | white | Visual inspection |
| Density | / | 1.98±0.02 | GB/T 533 |
| Mooney Viscosity, M(1+10)121C | / | 35-75 | GB/T 1232-1 |
| Tensile strength | MPa | ≥12.0 | GB/T 528 |
| Elongation at break | % | ≥240 | GB/T 528 |
| Compression Set(200°C，70h) | % | ≤35 | GB/T 7759 |
| Fluorine content | % | 71-72 | Combustion method |
Main applications
DS1302 is widely used for semiconductor
Application
1. Fluorelastomer copolymer has good heat stability under 200℃. It will generate trace decomposition if being put at 200-300℃ for a long time, and its decomposing speed accelerates at above 320℃, the decompositions are mainly toxic hydrogen fluoride and fluorocaibon organic compound.
2. Fluorous rubber cannot be mixed with metal power such as alumimum and magnesium power，or over 10% amine compound. If that happens, temperature will arise and several element will react with FKM, which will damage the equipment and operators.
Package, Transportation and Storage
1.Fluorous rubber is packed in PE plastic bags, and then loaded into cartons. Net weight is 20Kg per box
2.It is transported according to non-hazardous chemicals,and should keep away from pollutionsource,sunshine and water during transportation.
3.Fluorous rubber is stored in dean,dry and cool warehouse